High voltage semiconductor device having a sense electrode and a method of manufacturing the same.

摘要

On a p<-> substrate (31), an n<-> epitaxial layer (32) is surrounded and isolated by a p well (33). At the surface of the n<-> epitaxial layer (32), a p floating region (35) is provided in the vicinity of the p well (33) on which a sense electrode (SEN) is provided. An insulation film (36) and a conductive film (37) are formed on the n<-> epitaxial layer (32) between the p well (33) and the p floating region (35) to overlap them. The conductive film (37) and the p floating region (35) serve as a composite field plate, which makes it difficult for the surface electric field distribution to be influenced by the state of electric charge at the surface and relieves the surface electric field by expanding the depletion layer, which extends from the pn junction between the n<-> epitaxial layer (32) and the p well (33) into the n<-> epitaxial layer (32) in current blocking state, toward the centre of the n<-> epitaxial layer (32). The potential of the p floating region (35) is determined by capacity coupling in the current blocking state and thus the sense voltage characteristic monitored through the sense electrode (SEN) is smooth. <IMAGE>