METHOD TO PREVENT BACKSIDE GROWTH ON SUBSTRATES IN A VAPOR DEPOSITION SYSTEM,申请号IL19900095414-传众专利搜索

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发明名称	METHOD TO PREVENT BACKSIDE GROWTH ON SUBSTRATES IN A VAPOR DEPOSITION SYSTEM
摘要
申请公布号	IL95414(D0)	申请公布日期	1991.06.30
申请号	IL19900095414	申请日期	1990.08.17
申请人	CVD, INC.	发明人
分类号	C23C16/44;C23C16/04;C23C16/458;(IPC1-7):C23C/	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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