| 摘要 |
PURPOSE:To clean an inner part in a transmission passage and to prevent the lowering of the service life of various kinds of mirrors by guiding laser beam into a machining part with the transmission passage composed of an expandable protecting tube, discharging gas in the transmission passage at the time of shrinking the protecting tube and supplying the gas into the transmission passage at the time of extending the protecting tube. CONSTITUTION:The laser beam outputted from a laser beam oscillator 1 is guided into a machining head 5 through the transmission passage formed with each mirror part 4, optical path protecting tube 2, optical path bellows 3 and machine main body 6 and condensed with a lens in the machining head 5 and irradiates a work. Then, by relatively shifting the machine body 6 and the machining table 6a, the machining is executed. Further, since the optical path bellows 3 is moved to shrinkage according to the shift of the machine main body 6, the pressure in the transmission passage is varied. That is, when the optical path bellows is shrinked, air in the transmission passage is exhausted from air exhausting means 12. On the other hand, when the optical path bellows 3 is expanded, the air is supplied into the transmission passage from suction means 13 and the inner part in transmission passage can be held cleanly. |
