PRODUCTION OF SUPERCONDUCTIVE THIN FILM

摘要

PURPOSE:To enable stable production of a thin film having an excellent crystallinity by forming a ground layer composed of a composite oxide thin film having a composition of Y2BaCuOX on a substrate and subsequently forming a YBa2Cu3Oy superconductive film layer thereon. CONSTITUTION:On a substrate, e.g. an MgO single crystal substrate, a compound oxide thin film layer having Y2BaCuOx perovskite structure is formed as a ground layer. By forming a YBa2Cu3Oy compound oxide thin film on the above mentioned ground layer, the objective superconductive thin film is produced.