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发明名称
CLEANING SYSTEM
摘要
申请公布号
JPH03147323(A)
申请公布日期
1991.06.24
申请号
JP19890286817
申请日期
1989.11.01
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
HIROFUJI YUICHI
分类号
C02F1/04;H01L21/304
主分类号
C02F1/04
代理机构
代理人
主权项
地址
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