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发明名称
摘要
申请公布号
JPH0341433(B2)
申请公布日期
1991.06.24
申请号
JP19800502624
申请日期
1980.09.08
申请人
发明人
分类号
H01L21/02;C30B15/00;C30B15/20;C30B27/02;C30B29/40;C30B33/00;H01L21/208
主分类号
H01L21/02
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代理人
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