| 摘要 |
PURPOSE:To eliminate an additional facility for supplying, discharging medium gas or treating to eliminate toxicity, etc., and to simplify and reduce in size its structure by detachably composing a discharge tube for containing the gas therein. CONSTITUTION:A discharge tube 2 is formed at its tube body 11 in a rectangular parallelepiped shape of an electrically insulating material, and formed therein with a sealing space 12. A gas pouring port 13 for pouring medium gas in the space 12 is formed at one side face of the body 11, and blocked by a cap 14. Further, a pair of discharging electrodes 15a, 15b are oppositely provided along the longitudinal direction on the upper and lower inner surfaces of the tube 2. A discharging section 16 is formed between the electrodes 15a and 15b. Thus, the independently formed tube 2 is interposed between an upper plate 3 and a lower plate 4 for forming a holding body, end clamped by a plurality of clamping screws 23 inserted to the plates 3, 4. |
