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发明名称
ELLIPSOMETRIC METHOD FOR MEASURING DISTANCES OR FLATNESS
摘要
申请公布号
SU1657952(A1)
申请公布日期
1991.06.23
申请号
SU19894664084
申请日期
1989.03.21
申请人
INST PRIKLADNOJ FIZ AN BSSR
发明人
TIKHANOVICH SERGEJ A,SU;MAKSIMOVICH ELENA S,SU
分类号
G01B15/00
主分类号
G01B15/00
代理机构
代理人
主权项
地址
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