发明名称 DEVICE FOR DETECTING OFF-DIRECTION OF MICROSUBSTANCE
摘要 PURPOSE:To identify the off-direction of a microsubstance by allowing an off- direction deciding circuit to output an off-direction deciding signal in accordance with the off-direction of the microsubstance immediately before the microsubstance is deviated from a micro-substance detecting area in either direction of positive and reveerse direction. CONSTITUTION:Pulse modulated light is projected from a light emitting element 2 by driving an oscillation circuit 9 to form a microsubstance detecting area through a projection lens and the pulse modulated light is made incident from the area to a light receiving element through an imaging lense. Diffracted light receiving elements 8a, 8b and a non-diffracted light receiving element 7 in the light receiving element respectively output currents corresponding to the quantity of incident light and the currents are converted into voltages to remove a DC disturbance light component. Respective processing such as amplification, filtring, rectification, and smoothing is applied to respective signals and the processed signals, i.e. diffracted light detecting signals Sa, Sb and a threshold level signal Sref, are inputted to a detecting area deviation deciding circuit 16 and a direction deciding circuit 17.
申请公布号 JPH03146806(A) 申请公布日期 1991.06.21
申请号 JP19890287067 申请日期 1989.11.01
申请人 OMRON CORP 发明人 SAKAI YASUSANE;KITAJIMA HIROSHI;YAMASHITA MAKI
分类号 G01B11/00;G01N21/84;G01N21/88;G01N21/956;G06T1/00;H01L21/60 主分类号 G01B11/00
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