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发明名称
PRODUCTION OF HARD CARBON FILM
摘要
申请公布号
JPH03146665(A)
申请公布日期
1991.06.21
申请号
JP19890285601
申请日期
1989.10.31
申请人
SHIMADZU CORP
发明人
OKADA SHIGENOBU
分类号
C23C14/06;C23C14/58;C23C16/22;C23C16/26;C23C16/27;C23C16/511;C23C16/56
主分类号
C23C14/06
代理机构
代理人
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