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发明名称
DRY ETCHING DEVICE
摘要
申请公布号
JPH03145124(A)
申请公布日期
1991.06.20
申请号
JP19890283502
申请日期
1989.10.31
申请人
FUJITSU LTD
发明人
URAKUCHI MASAHIRO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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