PLASMA ETCHING REACTOR,申请号EP19860105478-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	PLASMA ETCHING REACTOR
摘要
申请公布号	EP0200133(B1)	申请公布日期	1991.06.19
申请号	EP19860105478	申请日期	1986.04.21
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	DESILETS, BRIAN HENRY;GUNTHER, THOMAS ANTHONY;HENDRICKS, CHARLES JOSEPH;KELLER, JOHN HOWARD
分类号	H01L21/302;C23F4/00;H01J37/32;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

您可能感兴趣的专利

SEPARATION OF WOOL FATTY ACID FROM WOOL ALCOHOL OR WOOL WAX

SYSTEM FOR MAINTAINING DESIRED LIQUID LEVELS IN EACH TANK OF A MULTI-TANK PROCESSING LINE FOR TREATING MATERIALS

METHOD OF AND APPARATUS FOR FORMING YARN PACKAGE AND YARN PACKAGE THUS OBTAINED

ASSEMBLY INCORPORATING ELECTRICALLY CONDUCTIVE ADHESIVE

PROCESS FOR REGULATING THE RIPENING OF COFFEE BERRIES

DISPLAY UNITS MORE PARTICULARLY FOR CASSETTES TAPE CARTRIDGES AND THE LIKE

ENERGISING CIRCUIT FOR GAS DISCHARGE LAMPS

PRODUCTION OF FATTY ACID ESTERS OF FRUCTOSE

PROCESS FOR THE BULK POLYMERISATION OF ALPHA-OLEFINS

DOUGH MIXING AND KNEADING MACHINE

PSEUDO-ISOCYTIDINE PROTECTED PSEUDO-ISOCYTIDINE AND METHODS FOR THEIR PREPARATTION

ADAMANTYLAMIDINES AND PROCESSES FOR MAKING THEM

HEAD-UP DISPLAY OPTICAL DEVICES

LOAD APPLAYING AND MEASURING PISTON ASSEMBLY FOR USE WITH A TRIAXIAL LOAD CELL

(A) ;PROCESS FOR PREPARING 66METHYLPUTELINE

(A) ;1*33DITHIORO*4*55B*PYRAZINEE22 YLIDENEEPROPANEDINITRILEE44OXIDE

PRODUCTION OF BIS-NITROPHTHALIMIDES-

GENTAMICIN DERIVATIVES