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发明名称
APPAREIL POUR LA CROISSANCE D'UN CRISTAL SEMICONDUCTEUR
摘要
申请公布号
FR2582149(B1)
申请公布日期
1991.06.14
申请号
FR19850011516
申请日期
1985.07.26
申请人
RESEARCH DEVELOPMENT CORP JAPAN
发明人
JUNICHI NISHIZAWA ET HITOSHI ABE;ABE HITOSHI
分类号
C23C16/52;C30B25/02
主分类号
C23C16/52
代理机构
代理人
主权项
地址
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