VORRICHTUNG FUER DIE MIKROPOSITIONIERUNG.

摘要

A micropositioning device having a plurality of degrees of freedom is provided. This device is particularly useful in guiding optic components. The device has N degrees of freedom and comprises two rigid members, namely a reference base and a movable platform. The reference base and the movable platform are connected by N independent chains. Each chain consists of N elastic guide means with a single degree of freedom, arranged in series, and an actuator fixed to the reference base.