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发明名称
METHOD FOR DETECTING SPOT POSITION AND SLIT POSITION
摘要
申请公布号
JPH03138504(A)
申请公布日期
1991.06.12
申请号
JP19890277769
申请日期
1989.10.24
申请人
KOBE STEEL LTD;KOBERUKO SYST KK
发明人
NISHIMOTO YOSHIRO;IMAOKA SHINICHI;IKEJIMA KANJI
分类号
G01B11/00;G01C3/06
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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