发明名称 Wafer alignment fixture.
摘要 <p>The wafer alignment fixture (10) is provided with a pair of upstanding walls (18) for mounting of a wafer cassette (11) thereon as well as with a roller (25) parallel to the walls (18) to engage with the wafers (12) of the cassette (11). Rotation of the roller (25) causes the wafers (12) in the cassette (11) to rotate so as to move the notches (13) of the wafers into alignment with the roller (25). Upon coming into alignment with the roller (25), the wafers (12) drop down onto a pair of support surfaces (45) while being spaced from the roller (25) so that further rotation is precluded. The roller (25) may be tensionsed in order to eliminate sag due to the weight of the wafers (12). Also, a second roller (47) may be provided for rotating the aligned notches (13) of the wafers (12) into a different angular position within the cassette (11).</p>
申请公布号 EP0431814(A1) 申请公布日期 1991.06.12
申请号 EP19900312867 申请日期 1990.11.27
申请人 SILICON TECHNOLOGY CORPORATION 发明人 STEERE, ROBERT E., JR.
分类号 H01L21/22;H01L21/68 主分类号 H01L21/22
代理机构 代理人
主权项
地址