发明名称 PLATINUM OR RHODIUM CATALYZED MULTILAYER CERAMIC COATINGS FROM HYDROGEN SILSESQUIOXANE RESIN AND METAL OXIDES
摘要 PLATINUM OR RHODIUM CATALYZED MULTILAYER CERAMIC COATINGS FROM HYDROGEN SILSESQUIOXANE RESIN AND METAL OXIDES This invention relates to materials produced by diluting in a solvent a platinum or rhodium catalyzed preceramic mixture of a hydrogen silsesquioxane resin and a metal oxide precursor selected from the group consisting of an aluminum alkoxide, a titanium alkoxide, and a zirconium alkoxide. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO2/metal oxide coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.
申请公布号 CA1284748(C) 申请公布日期 1991.06.11
申请号 CA19870549578 申请日期 1987.10.19
申请人 HALUSKA, LOREN A. 发明人 HALUSKA, LOREN A.;MICHAEL, KEITH W.;TARHAY, LEO
分类号 H01L21/312;C23C18/12;H01L21/314 主分类号 H01L21/312
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