发明名称 |
PLATINUM OR RHODIUM CATALYZED MULTILAYER CERAMIC COATINGS FROM HYDROGEN SILSESQUIOXANE RESIN AND METAL OXIDES |
摘要 |
PLATINUM OR RHODIUM CATALYZED MULTILAYER CERAMIC COATINGS FROM HYDROGEN SILSESQUIOXANE RESIN AND METAL OXIDES This invention relates to materials produced by diluting in a solvent a platinum or rhodium catalyzed preceramic mixture of a hydrogen silsesquioxane resin and a metal oxide precursor selected from the group consisting of an aluminum alkoxide, a titanium alkoxide, and a zirconium alkoxide. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO2/metal oxide coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices. |
申请公布号 |
CA1284748(C) |
申请公布日期 |
1991.06.11 |
申请号 |
CA19870549578 |
申请日期 |
1987.10.19 |
申请人 |
HALUSKA, LOREN A. |
发明人 |
HALUSKA, LOREN A.;MICHAEL, KEITH W.;TARHAY, LEO |
分类号 |
H01L21/312;C23C18/12;H01L21/314 |
主分类号 |
H01L21/312 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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