摘要 |
PURPOSE:To obtain the sintered body of black AlN having a high density and high thermal conductivity in spite of low-temp. sintering by compounding base material aluminum nitride, a specific blackening agent and a sintering assistant at prescribed ratios. CONSTITUTION:This sintered body of the black aluminum nitride consists of the aluminum nitride as the base material, the silicide of group IVa, Va, VIa or VIII elements of periodic table as the blackening agent and IIa compd. and/or IIIa comps. of periodic table as the sintering agent and contains the blackening agent at 0.01 to 10wt.% and the sintering assistant at 0.5 to 10wt.% in terms of oxide. The blackening agents to be used include Ti5Si3, Ta3SI, Nb5SI3, MoSi2, WSi2, and CoSi, etc. The sintering assistant are exemplified by.Er2O3, Yb2O3, La2O3, Sm2O3, Pr6O11, Nb2O3, Ce2O3, Y2O3, CaO, BaO, SrO, etc. |