摘要 |
Provided is a metal oxide semiconductor with an inverted U-shaped recess formed therein, the recess having two relatively deep outside channels and an interconnecting relatively shallow channel. The recess is filled with polycrystalline silicon gate material, and when biased, a conductive region is formed alongside an outside channel. Also provided also is a method of forming such an inverted U-shaped recess in a metal oxide semiconductor.
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