发明名称 MOS semiconductor device with an inverted U-shaped gate
摘要 Provided is a metal oxide semiconductor with an inverted U-shaped recess formed therein, the recess having two relatively deep outside channels and an interconnecting relatively shallow channel. The recess is filled with polycrystalline silicon gate material, and when biased, a conductive region is formed alongside an outside channel. Also provided also is a method of forming such an inverted U-shaped recess in a metal oxide semiconductor.
申请公布号 US5021846(A) 申请公布日期 1991.06.04
申请号 US19900475713 申请日期 1990.02.06
申请人 FUJI ELECTRIC CO., LTD. 发明人 UENO, KATSUNORI
分类号 H01L21/331;H01L21/336;H01L29/423;H01L29/78 主分类号 H01L21/331
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