| 摘要 |
PURPOSE: To control supply pressure to precise and reduced pressure and to maintain it by providing a fixing restriction for a feedback conductor and making a flow rate to be equal to a flow rate passing through pressure subordinate restrictions. CONSTITUTION: A feedback line is provided with the fixing restriction Ri and a control room 10 is connected to a spring room 13 with the conductor 16. The pressure subordinate restrictions 21 and 25 are provided in the conductor 16. When the flow rate Qi passing through the fixing restriction Ri is equal to the flow rate Qo passing through the pressure subordinate restrictions 21 and 25, a control piston 6 is constituted to occupy a stable position. Thus, desired and reduced pressure can be kept almost constant in spite of the substantial fluctuation of supply pressure. |
