| 摘要 |
PURPOSE:To execute grinding with high accuracy by pushing a grinding tape to the reverse side of a rotating stamper for optical disk manufacture by a pushing roller and using a roller equipped with rubber, which hardness regulated by a JIS K 6301 is less than 80 degree, on the surface when the reverse side is ground. CONSTITUTION:Concerning an optical disk, since the degree of flatness for the forming surface of a group and/or a bit affects the performance of the optical disk as it is, it is an important problem not to increase surface accuracy for the surface of a glass plate to be a base and the reverse side of the stamper when the stamper is prepared. Accordingly, when the reverse side is ground, a grinding tape 2 is taken up by a take-up reel 3 while rotating the stamper 10 at 100-400rpm and simultaneously, a feed reel 1, the reel 3 and a pushing roller 4 are integrally reciprocatively moved in the radial direction of the stamper 10. At such a time, however, on the surface of the pushing roller 4, a rubber layer is provided with less than 80 degree hardness and more than 5mm thickness. Then, pressure is set to 0.5-3.0kgf/cm<2> and tape feeding velocity is set to 1.0-4.0mm/sec. |
