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发明名称
VAPOR GROWTH APPARATUS
摘要
申请公布号
JPH03129722(A)
申请公布日期
1991.06.03
申请号
JP19890167040
申请日期
1989.06.30
申请人
SHOWA DENKO KK
发明人
HOSHI KINJI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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