发明名称 MANUFACTURE OF READ-ONLY SEMICONDUCTOR MEMORY DEVICE
摘要 PURPOSE:To shorten a manufacturing process by a method wherein a MOS transistor of stacked gate structure is used as a memory cell, and data are written in at a time by the selective irradiation of ultraviolet rays before a sealing and assembling process. CONSTITUTION:A floating gate 4 and a control gate 6 are provided onto the primary surface of a semiconductor substrate 1 to form a MIS field effect transistor, and cells formed of the MISFET transistors are arranged in matrix. As a positive voltage is applied on the control gate 6 of the memory cell, the memory cell matrix is selectively irradiating with ultraviolet rays using a mask 8 of a pattern required to be stored to inject electrons into the floating gate 4 of the prescribed cell to write data. By this setup, a memory device of this design can be shortened in manufacturing process.
申请公布号 JPH03129877(A) 申请公布日期 1991.06.03
申请号 JP19890269603 申请日期 1989.10.16
申请人 NEC KYUSHU LTD 发明人 NODA KENJI
分类号 H01L21/8247;H01L21/8246;H01L27/112;H01L29/788;H01L29/792 主分类号 H01L21/8247
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