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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03129815(A)
申请公布日期
1991.06.03
申请号
JP19890268445
申请日期
1989.10.16
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
ITO YUTAKA;WADA ATSUO
分类号
H01L21/20;H01L21/263;H01L21/84
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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