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发明名称
HEATING AND EVAPORATING SOURCE FOR CHARGE PARTICLE BOMBARDMENT
摘要
申请公布号
JPH03126863(A)
申请公布日期
1991.05.30
申请号
JP19890262538
申请日期
1989.10.06
申请人
JEOL LTD
发明人
RIKITAKE TOSHIO
分类号
C23C14/30
主分类号
C23C14/30
代理机构
代理人
主权项
地址
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