| 摘要 |
PURPOSE:To effectively and easily form an inner electrode of desired alloy composition by composing the inner electrodes containing alloy composition by laminating a plurality of alloy films formed by a thin film forming method and alloying them in the case of baking ceramics. CONSTITUTION:A first metal film 2 is formed on a film 1 by a thin film forming method. A metal material for forming the film 2 includes, for example, silver, palladium, nickel, copper suitably for use. Then, a second metal film 3 having a composition different from that of the film 2 is formed on the film 2 by a thin film forming method to obtain a laminated metal film 4. The film 3 is formed to contain different composition from that of the film 2 to realize alloy composition of an inner electrode. The thicknesses of the films 2, 3 are selected at their ratio to meet a desired alloy composition. Then, the film 4 is patterned, and laminated metal films 4a, 4b,... are formed. |
