| 摘要 |
PURPOSE:To accurately and suitably perform correction of variation in an optical beam scanner, correction of positional deviation of a board and correction of a trimming position by detecting the position of a reference mark attached to a probe card and using the position as a reference. CONSTITUTION:A corner cube 81 in which its vertex is slightly lacked is attached to the end of an arm attached to a probe card 51, and so disposed that its imaginary vertex becomes substantially the height of the surface of a board to match a focus. Since the cube 81 lacks the vertex of its triangular conical shape, a reflected light of the part is reduced, and observed as a dark part of a triangle on a monitor camera. That is, the card 51 is disposed in height for imaging the triangle on the surface of the board. Accordingly, the position where the triangle is detected becomes the position of a reference mark. In other words, the image of the board including the mark is registered in advance as a reference image pattern, and the coincidence of it with the image by the camera is detected by a pattern matching method. |
