MICROVALVE

摘要

A moving valve plate (14), provided with slot-shaped valve openings (16), is arranged in a displaceable manner between two fixed valve plates (10, 12) which are connected to one another and have corresponding, slot-shaped valve openings (16). An electrostatic drive is integrated with the valve plates (10, 12, 14). It consists of strip-shaped electrodes (20, 22) which in each case are located opposite corresponding electrodes of another valve plate. The positioning forces required to move the moving valve plate (14) are generated by the application of suitable control potentials, of the same or opposite polarity, to the electrodes of different valve plates. ……