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发明名称
MIM CAPACITY STRUCTURE
摘要
申请公布号
JPH03125470(A)
申请公布日期
1991.05.28
申请号
JP19890264160
申请日期
1989.10.11
申请人
MITSUBISHI ELECTRIC CORP
发明人
YOSHII YASUSHI;SEKI HIROAKI
分类号
H01L27/04;H01L21/822;H01L49/02
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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