| 摘要 |
PURPOSE:To obtain a moisture-sensitive thin film element having high sensitivity and high response by containing a polyimide thin film with thickness of 1000Angstrom or less having a repeated unit structure represented by a specific general formula. CONSTITUTION:This thin film moisture-sensitive element is formed by laminating an amphipathic polymer substance having a repeated unit represented by formula I on a substrate of every kind, for example, by Langmuir-Blodgett's techique and subsequently forming the same into a polyimide thin film by imidation reaction. The thickness of the polyimide thin films is set to 1000Angstrom or less, pref., 500Angstrom or less, more pref., 300Angstrom or less to as to easily generate the desorption of moisture over the whole of the thin film. By this constitution, the thin film moisture-sensitive element excellent in temp. resistance and chemical resistance and having high sensitivity and high speed response can be provided. |
