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发明名称
ETCHING
摘要
申请公布号
JPH03120827(A)
申请公布日期
1991.05.23
申请号
JP19890259396
申请日期
1989.10.04
申请人
SONY CORP
发明人
SHINOHARA KEIJI
分类号
H01L21/3213;H01L21/3205;H01L23/52
主分类号
H01L21/3213
代理机构
代理人
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