| 摘要 |
PURPOSE:To reduce an error in registration for improving transfer accuracy by providing an exposure value controlling means for making the exposure value uniform in an exposure range and a position reference controlling means for moving a one-dimensional position reference of the exposure value controlling means with respect to an exposure device frame. CONSTITUTION:A shutter controller 64 controls a position or a moving speed of shutter apertures 36 and 37 at each time point based on a shutter driving table. Thus position references of the shutter apertures 36, 37 are shifted corresponding to a shift y of a current profile 2i with respect to a reference profile 1i due to a y fluctuation of a posture of an aligner 40, and the tip 1a of the shutter aperture is shifted by y to 2a and the rear end 1b is shifted to 2b. Therefore a time required since the tip 2a of the shutter aperture passes by until the rear end 2b passes by is shifted according to a shift amount of the profile 2i to make an exposure value over an entire exposure range uniform. |
