Method of making a semiconductor sensor having funnel-shaped apertures in the semiconductor substrate.

摘要

A semiconductor sensor (20) with a compact structure is provided, which comprises a semiconductor substrate (21), a semiconductor diaphragm (23) integrally formed with the semiconductor substrate, and a penetrating aperture (27) formed in the semiconductor substrate so as to surround desired sides of the diaphragm. The aperture (27) has both a first funnel-shaped aperture (127) and a second funnel-shaped aperture (227) jointed to the first funnel-shaped aperture. A cavity (26) for defining the diaphragm (23) is provided when the semiconductor substrate (21) is subjected to electrolytic etching to form the second funnel-shaped aperture (227) therein.