| 摘要 |
PURPOSE:To execute a high-output oscillation whose waveguide loss is small and whose efficiency is high by a method wherein film thicknesses of coatings on wall faces of two pairs of opposite metal bodoes of a discharge path are made specific at each pair. CONSTITUTION:Out of opposite metal bodies 11, 12 which form a hollow region 10 to be used as a discharge path, one pair of metal bodies 11 are connected to a high-frequency power supply RF via a matching circuit and also function as electrodes for a high-frequency electric discharge in a transverse direction. A thickness d1 of thin films 13 which are coated on wall faces of the metal bodies and whose absorption loss is small at an oscillation wavelength band of a laser beam is set to nearly d1=lambdaq/(n -1)<1/2>. Wall faces of the other pair of metal bodies 12 are used as they are or are coated with thin films. When the films are coated, their thickness d2 is set to nearly d2=lambda(q-1)(n -1)<1/2>. In the formulas, lambda represents a wavelength of a laser beam, q represents a positive odd number and nf represents a refractive index of the coating film. Thereby, a high-output oscillation whose waveguide loss is small and whose efficiency is high can be executed. |
