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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03116921(A)
申请公布日期
1991.05.17
申请号
JP19890256050
申请日期
1989.09.29
申请人
FUJITSU LTD;FUJITSU VLSI LTD
发明人
OKUDA SHOJI
分类号
G03F7/20;H01L21/027;H01L21/30
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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