PRODUCTION OF SPUTTERING TARGET MATERIAL,申请号JP19890250937-传众专利搜索

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发明名称	PRODUCTION OF SPUTTERING TARGET MATERIAL
摘要
申请公布号	JPH03115563(A)	申请公布日期	1991.05.16
申请号	JP19890250937	申请日期	1989.09.27
申请人	NIPPON MINING CO LTD	发明人	SAWADA SUSUMU;OHASHI TAKEO;FUKUYO HIDEAKI;NAKAMURA YUICHIRO
分类号	C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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