发明名称 NARROW-BAND OSCILLATION EXCIMER LASER
摘要 PURPOSE:To make it possible to perform easily an inspection of the state of an alignment and an inspection of wavelength selecting elements and the like without putting out of order an optical axis in the present state by a method wherein a total reflection mirror facing its reflective surface to the side of a laser chamber is arranged at at least one place between the mutual two of a rear mirror, the wavelength selecting elements and the laser chamber making it possible to take in and out. CONSTITUTION:A total reflection mirror 6 is inserted between a laser chamber 1 and a rear mirror 4 at an arbitrary position between the chamber 1 and the mirror 4 facing the reflective surface of this mirror 6 to the side of the chamber 1. The gate of this mirror 6 is changed to adjust the alignment of the mirror 6 to a front mirror 3. In this case, there are a free running state that the mirror 6 is inserted between the chamber 1 and wavelength selecting elements 5 and an oscillation state that the mirror 6 is inserted between the chamber 1 and one side of the elements 5 or between both elements 5. The mirrors 6 may be arranged in such a way that they can be slided in their insertion directions by a slide device 7 at their respective insertion positions. At this time, motors 8 are mounted on the respective mirror of the mirrors 6 and the gates of the mirrors 6 are controlled.
申请公布号 JPH03114280(A) 申请公布日期 1991.05.15
申请号 JP19890250675 申请日期 1989.09.28
申请人 KOMATSU LTD 发明人 KOBAYASHI YUKIO;WAKABAYASHI OSAMU;KOWAKA MASAHIKO
分类号 H01S3/08;H01L21/027;H01S3/082;H01S3/105;H01S3/106 主分类号 H01S3/08
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