发明名称 Process for the production of an inverted structure, active matrix display screen
摘要 Process for producing a wall for an active matrix display screen. By a first etching is formed stack rows of layers (L) with a metal at the bottom. The gaps between the rows are filled by a negative polyimide. On the surface are etched columns (C) and blocks (P). These elements serve as a mask for an etching leaving control transistors in a gate configuration below the same. Application to the production of liquid crystal display screens.
申请公布号 US5015597(A) 申请公布日期 1991.05.14
申请号 US19900573340 申请日期 1990.08.24
申请人 CENTRE NATIONAL D'ETUDES DES TELECOMMUNICATIONS ET D'ETUDES SPATIALES 发明人 VINOUZE, BRUNO;CHOUAN, YANNICK
分类号 G02F1/1343;G02F1/136;G02F1/1368;G09F9/35;H01L21/20;H01L21/336;H01L21/84;H01L27/12;H01L29/78;H01L29/786 主分类号 G02F1/1343
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