| 摘要 |
PURPOSE:To accomplish the vapor phase synthesis of diamond in a stabilized manner for a long time by partly spraying hydrogen gas etc., on a specified area on a thermoelectron-radiative material to prevent graphite or amorphous carbon from deposition on the material. CONSTITUTION:The objective unit is made up of (A) a reaction vessel 1, (B) a means 7 to feed a raw material gas into the vessel 1, (C) a substrate supporting table 4 set up in the vessel 1, and (D) a thermoelectron-radiative means with a thermoelectron-radiative material 10 located close to the surface of the substrate 2. Specified positions of the thermoelectron-radiative material 10 are provided with gas spraying means 11a, b, and hydrogen gas or a gas of a group VIII element is preheated and partly sprayed on a specified area on the material 10. |
