摘要 |
PURPOSE:To improve resistance against earthquake and insulation characteristics of an insulation tube to stabilize laser oscillation by constituting a cathode of a pair of electrode rods, an insulation plate provided on one side of the cathode rods and a trigger steel plate provided between the cathode rods on the other side. CONSTITUTION:A cathode 10 and an anode 3 are placed in parallel inside an arc tube 1 while an insulation tube 4a is placed on a surface facing the anode 3. The cathode 10 is constituted of a pair of electrode rods 10a, 10b, an insulating plate 10c provided on one side of the electrode rods, and a trigger steel plate 2b provided between the electrode rods on the other side. That is, the insulation tube 4a is fixed to the insulation plate 10c while the insulation tube 4a is made outside a region of glow discharge. Thus resistance against earthquake and insulation property can be improved and stable laser oscillation can be performed as well. |