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发明名称
VERFAHREN ZUR CHARAKTERISIERUNG EINER ISOLATIONSSCHICHT UND ANORDNUNG ZUM DURCHFUEHREN DES VERFAHRENS
摘要
申请公布号
DE3932572(A1)
申请公布日期
1991.05.08
申请号
DE19893932572
申请日期
1989.09.29
申请人
SCHINHAERL, KURT, DIPL.-ING. (FH), 8440 STRAUBING, DE
发明人
SCHINHAERL, KURT, DIPL.-ING. (FH), 8440 STRAUBING, DE
分类号
G01N27/00;G01R31/02;G01R31/12;H01L21/66
主分类号
G01N27/00
代理机构
代理人
主权项
地址
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