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发明名称
摘要
申请公布号
JPH0348224(U)
申请公布日期
1991.05.08
申请号
JP19890109905U
申请日期
1989.09.19
申请人
发明人
分类号
H01L21/027;H01L21/30;(IPC1-7):H01L21/027
主分类号
H01L21/027
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代理人
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