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发明名称
METHOD OF AND APPARATUS FOR TESTING SEMICONDUCTOR DEVICES
摘要
申请公布号
EP0245115(B1)
申请公布日期
1991.05.08
申请号
EP19870304121
申请日期
1987.05.08
申请人
OKI ELECTRIC INDUSTRY COMPANY, LIMITED
发明人
FUKUDA, YASUHIRO C/O OKI ELECTRIC INDUSTRY CO. LTD
分类号
G01R31/12;G01R31/26;G01R31/30;G01R31/3161
主分类号
G01R31/12
代理机构
代理人
主权项
地址
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