| 摘要 |
PURPOSE:To form a probe effectively in a fine size further to improve its operation workability by constituting an electrostatic motor between a rotor and a semiconductor base unit, having a plurality of ultrasonic vibrators, and selecting them via the rotor by its movement while transceived signals being transmitted and received. CONSTITUTION:Many ultrasonic vibrators 2 and amplifying and contact parts 3, 4 facing respective ultrasonic vibrators 2 are arranged respectively linearly on a silicon substrate 1, while a rotor 6 is movably provided to be engaged with a guide groove 5, formed in the silicone substrate 1, so as to selectively come into contact with each contact part 4. Also, in the silicon substrate 1, a stator side electrode 7 is provided along a moving a direction of the rotor 6 so as to be opposed to it, while in the rotor 6, a rotor side electrode is provided so as to be opposed to the stator side electrode 7, and by constituting an electrostatic motor with these stator side electrode 7 and rotor side electrode, the rotor 6 is linearly moved along an arrangement direction of the contact part 4. Thus, by moving the rotor 6 by the electrostatic motor, the four ultrasonic vibrators 2, are successively selectively linear-scanned through the rotor 6 while being displaced one by one. |
