| 摘要 |
PURPOSE:To make a single pulse output low, to make a repetition frequency high and to make an average output high by a method wherein a gap length and an effective electrode length of a main discharge electrode are limited within a specific ranges. CONSTITUTION:An excimer laser oscillator is oscillated by a system which is composed of a laser resonator 1, a reflecting mirror 2 and an output mirror 3. When a gap length of a main discharge electrode is set at 5mm or lower and an effective electrode length is set at 200mm or lower in the oscillator, a single pulse output can be made low, a repetition frequency can be made high and an average output can be made high. Thereby, an irregularity between pulses can be made small, lives of a laser gas, the main discharge electrode, a narrow-band element and the like can be made long and an illuminance irregularity can be prevented. |
