| 摘要 |
PURPOSE:To improve reliability by coating an amorphous carbon protective film with a carbon fluoride group. CONSTITUTION:A chromium film of 0.5mum and the amorphous carbon film of 0.05mum are formed by sputtering on a 5.25 inch disk substrate 10 made of aluminum subjected to nickel-phosphorus plating and thereafter, the substrate 10 is put into a reaction chamber 1 and is fixed by a substrate supporting device 2. While the inside of the chamber 1 is evacuated by a vacuum pump 5, tetrafluoromethane is introduced from a raw material tank 4 through a piping 6 into the chamber 1 until the pressure in the chamber 1 attains 5 Torr. While the disk 10 is rotated by the rotating mechanism of the device 2, an IR laser beam 8 from an IR Raman laser is projected onto the substrate 10 by a condenser system 7 and the condenser system 7 is slowly moved in the radial direction of the substrate 10, by which the entire surface of the disk 10 is irradiated with light 8. The stable lubricating characteristics are provided under all environmental conditions and the longer life and the higher reliability are obtd. |
