Solution component sensor device

摘要

Disclosed is a sensor device for detecting a specified chemical component of a solution. The sensor device includes an electrode for generating a potential corresponding to a concentration of a specified component of a solution, a reference electrode including a insulated-gate FET having a film insensitive to the component of the solution formed on the gate region, and an electrode for detecting a potential difference between the potential generating electrode and the reference electrode. The insensitive film included in the reference electrode contains a siloxane copolymer.