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发明名称
CATHODE OF A MAGNETRON-TYPE SPUTTERING EQUIPMENT
摘要
申请公布号
PL153335(B2)
申请公布日期
1991.04.30
申请号
PL19890278991
申请日期
1989.04.18
申请人
发明人
分类号
B05B;C23C14/35;(IPC1-7):C23C14/35
主分类号
B05B
代理机构
代理人
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地址
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