| 摘要 |
PURPOSE:To detect only a true failure and to eliminate the need of worker's reconfirmation by outputting a pattern remainder failure signal by an inter- pattern distance inspecting circuit, in the case of two opposed points on an inter-pattern distance measuring mask are on a pattern. CONSTITUTION:An inspection object pattern is scanned by a photoelectric converting scanner 1, and an input image 2 which is read out is converted to a binary image 4 by a binarizing circuit 3. Subsequently, a pattern remainder detecting mask of dimensions set in advance to the image 4 is scanned by synchronizing with a raster scan, and in case the center part of the pattern remainder detecting mask is on the pattern, and also, all points on the pattern remainder detecting mask are not on the pattern, it is outputted as a pattern remainder detecting signal 6 by a pattern remainder detecting circuit 5. Next, by the signal 6, an inter-pattern distance measuring mask being larger by dimensions set in advance than the pattern remainder detecting mask is scanned. Also, in case two opposed points on the inter-pattern distance measuring mask are on the pattern, a pattern remainder failure signal 8 is outputted by an inter-pattern distance inspecting circuit 7. |
