| 摘要 |
PURPOSE:To execute the inspection without correcting the inclination of an inspection object pattern by scanning a circular mask whose diameter is set in advance instead of calculating the pattern width in the limited direction. CONSTITUTION:When a circular mask 13 whose diameter is set in advance is scanned against a pattern 11 in an inspecting position A12, since two opposed points (a), (b) of the mask 13 are both on the pattern 11, and also, two points (d), (e) being orthogonal thereto are also on the pattern 11, it is not detected as a pattern width failure. However, when a circular mask 15 is scanned against the pattern 11 in an inspecting position B 14, two opened points (g), (h) of the mask 15 are both on the pattern 11, and also, two points (j), (k) being orthogonal thereto are not on the pattern 11, therefore, it is detected as a pattern width failure. |
